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Sangwoo Lee+, Jaejin Hwang+, Joonbong Lee, Hyunbin Chung, Dae Haa Ryu, Heeseo Yun, In Gyu Choi, Hyojun Jung, Kwanwoo Lee, Sanghak Yeo, Sungwoo Lee, Jaeyoung Yang, Ho Jung Jeon, You Seung Rim, Jaekwang Lee*, Taekjib Choi* Optimizing Low-k SiCOH films deposited by PECVD with a novel C6H16OSi precursor:Impact of O/C ratio. Materials Chemistry and Physics 334, 130510 (2025) |
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